§16§§This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management. § §13§Table of content:§Chapter 1 Wafer fabrication system-semiconductor manufacturing, process, manufacturing system, machining system, dispatch§Chapter 2 Automatic Materiel Handling System (AMHS) in wafer fabrication-development, sub-systems, layout, features§Chapter 3 AMHS modeling-modeling based on network flow, queueing theory, Mathematical Programming model, Markov model, Simulation Model, Petri network model§Chapter 4 AMHS performance analysis-description of the running of AMHS, frequently-used analytical methods, extended Markov model, performance analysis based on extended Markov model§Chapter 5 AMHS dispatch-dispatch based on Heuristic Rules, operational research, intelligent algorithm§Chapter 6 Dispatch of Interbay handling system-methods, model, structure, dispatch based on Complex Heuristic Rules§Chapter 7 Dispatch of Intrabay handling system-dispatch based on GDP, Push-Pull theory§Chapter 8 Dispatch at system level-dispatch based on PMPGA, GARL Comp §13§lex Heuristic Rules§Chapter 9 Performance and evaluation-system performance modeling, modeling based on AOKCTP, performance analysis, case studies§ §02§§Jie Zhang, Shanghai Jiaotong University, Shanghai, China §
