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Plasma Etching : Fundamentals and Applications (Series on Semiconductor Science and Technology)

Sugawara, M.
494.42 SGD
Member Price
444.98
English

Product Description

The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.
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The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.

... Read Full Text

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