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Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

Nonogaki, Saburo/ Takumi, Ueno/ Ito, Toshio
920.48 SGD
Member Price
828.44
English

Product Description

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."
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"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

... Read Full Text

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