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MEMS Mechanical Sensors

Beeby, Steve P./ Ensel, Graham/ Kraft, Michael E.
214.25 SGD
Member Price
192.83
English

Product Description

The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.

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