Low Dielectric Constant Materials for IC Applications (Springer Series in Advanced Microelectronics Vol.9) (2003. XIX, 309 p. w. 163 figs. 24 cm)

Low dielectric materials are an important component of microelectronic devices. In this carefully edited volume the leading researchers give an introduction to and a survey of the various fields of dielectrics for IC integration. The book appeals to materials reserachers, electrical engineers and advanced students.