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Defects and Properties of Semiconductors : Defect Engineering (Advances in Solid State Technology)

Chikawa, J. (EDT)/ Sumino, K. (EDT)/ Wada, K. (EDT)
146.47 SGD
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131.83

Product Description

Defect study in semiconductor engineering started originally with seeking methods how to suppress generation of harmful defects during device processing in order to achieve a high yield of device fabrication.

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